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Shape Evaluation of Photomask Lens Arrays Molded with a Gray-Scale Mask/Noncontact 3D surface profile measurement using a laser microscope


1. Application

Gray-scale masks is a technology used to fabricate molds for complex-shaped micro lenses or other products that are comprised of high-quality 3D microstructures. The gray-scale mask is used for 3D patterning; a resist coating is irradiated with a multiple-gradation laser to create the 3D pattern (Figure 1). Measuring the 3D shape of the resist after irradiation is essential for quality control. Since the 3D pattern is easily damaged, noncontact measurement is required to verify its integrity.

2. Olympus' solution

Olympus' LEXT 3D laser scanning microscope enables noncontact, three-dimensional imaging of the concave or convex shape of a gray-scale mask with high resolution and high contrast. Thanks to objective lenses with high numerical apertures and an optical system designed to obtain maximum performance from the 405 nm laser, the LEXT microscope can capture the profile of irregular slopes accurately, leading to reproducible, reliable 3D profiles (Figure 1). In addition to measuring the shape of samples, users can also clearly visualize minor irregularities using laser differential interference.

Concave pattern
Gray scale mask 凹 ob50×
Objective lens: 50x 50X, Zoom 1x
Gray scale mask 凹 ob50× 3D
Objective lens: 50x 50X, Zoom 1x
Gray scale mask 凹 ob100× 3D
Objective lens: 100x 100X, Zoom 1x
Convex pattern
Gray scale mask 凸 ob50×
Objective lens: 50x 50X, Zoom 1x
Gray scale mask 凸 ob50× 3D
Objective lens: 50x 50X, Zoom 1x
Gray scale mask 凸 ob100× 3D
Objective lens: 100x 100X, Zoom 1x

Figure 1. Imaging concave and convex patterns using the LEXT microscope

Figure 2. The lens fabrication process using a gray-scale mask.

Step 1

  1. Resist coating
    Resist coating
    Apply resist onto the glass.
     
  2. Drawing (laser irradiation)
    Drawing (laser irradiation)
    Irradiate the resist with a multiple-scale laser beam to create a positive resist.
    The irradiated area is exposed and softened.
     
  3. Soak in the developer
    Soak in the developer
    Develop the resist and strip away unnecessary regions. 3D profile evaluation during this phase is key to quality management.

Step 2

  1. Electroplating
    Electroplating
    Apply plating to the resist.
     
  2. Etching
    Etching
    Dissolve the resist through etching and flip the plating over to complete the original (metal mold).

Step 3

  1. Use thermo-compression to bond the film to the metal mold.
    Use thermo-compression to bond the film to the metal mold
     
  2. Imprint
    Imprint
    Peel the film off the metal mold and flip it over.
     
  3. Resin molding
    Resin molding
    Pour resin into the film.
     
  4. Finish
    Finish
    Solidify the resin and remove it from the film mold to complete the lens.
Olympus IMS
应用所使用的产品

使用奥林巴斯 LEXT OLS5000 激光扫描共焦显微镜,能够通过非接触、非破坏的观察方式轻松实现 3D 观察和测量。仅需按下“Start(开始)”按钮,用户就能在亚微米级进行精细的形貌测量。该产品不仅易于使用,更具备先进功能,能够提供四倍于上一代型号的采集速度。对于需要观察大型样品的客户,LEXT 的长工作距离物镜和选配的扩展机架使得系统能够适用于最大为 210mm 的样本。
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