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Quality management in working with extra-fine tubes / Surface roughness analysis of a micro area using a laser microscope


Application

As the demand for smaller products continues to grow, parts used to make these products also become smaller. Such parts include probe cards for semiconductor inspection and extra-fine metal tubes used for medical equipment. Today, it’s possible to produce ultra-fine metal tubes with a diameter as small as 10μm, smaller than the diameter of a human hair. Producing these extremely fine metal tubes requires careful monitoring of the surface profile during the bending and drawing processes, the condition of electric discharge machining applied to the surface, and the state of the cutting surface. However, monitoring these conditions is problematic because the portions being machined are so small that conventional analytical methods cannot evaluate them properly.

Olympus' solution

Olympus 3D scanning laser microscope LEXT scans a micro area with a laser to measure the fine surface profile, or roughness. The microscope’s non-contact laser stylus accurately reproduces the shape of a micro area, something that is almost impossible to do using a contact-type probe. The horizontal resolution is 0.12 μm, and the step resolution is 5 nm. The measurement accuracy is traceable. These features make it possible to effectively monitor the surface profile of even very small parts.
 

Surface of a metal tube

surface of a metal tube_objective 20x_zoom 1x
20X objective lens; 1x zoom

surface of a metal tube_objective 100x_zoom 8x
100X objective lens; 8x zoom

Cutting surface evaluation

cutting surface evaluation_objective 20x_zoom 1x
20X objective lens; 1x zoom

cutting surface evaluation_objective 100x_zoom 2x
100X objective lens; 2x zoom

Olympus IMS
应用所使用的产品

使用奥林巴斯 LEXT OLS5000 激光扫描共焦显微镜,能够通过非接触、非破坏的观察方式轻松实现 3D 观察和测量。仅需按下“Start(开始)”按钮,用户就能在亚微米级进行精细的形貌测量。该产品不仅易于使用,更具备先进功能,能够提供四倍于上一代型号的采集速度。对于需要观察大型样品的客户,LEXT 的长工作距离物镜和选配的扩展机架使得系统能够适用于最大为 210mm 的样本。
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